Robert Wu - San Diego CA,
Tuqiang Ni - Pleasanton CA,
Advanced Micro-Fabrication Equipment, Inc. Asia - Georgetown, Grand Cayman
118723E, 15634533, 15634534, 15634543, 15634545
A showerhead for use in a capacitively-coupled plasma chamber and made of low resistivity bulk layer coated with CVD SiC. The bulk low resitivity material may be, for example, graphite, Silicon Carbide (SiC), converted graphite, SiC+C, etc. Sintered SiC may be used as the bulk material coated with CVD SiC to provide a showerhead that is suitable for use in a capacitively-coupled plasma chamber.